Method of Ga removal from a specimen on a microelectromechanical system-based chip for in-situ transmission electron microscopy
Abstract In-situ transmission electron microscopy (TEM) holders that employ a chip-type specimen stage have been widely utilized in recent years.The specimen on the microelectromechanical system (MEMS)-based chip is commonly prepared by focused ion beam (FIB) milling and ex-situ lift-out (EXLO).However, the FIB-milled thin-foil specimens are inevit